학회 |
한국공업화학회 |
학술대회 |
2020년 가을 (10/28 ~ 10/30, 광주 김대중컨벤션센터(Kimdaejung Convention Center)) |
권호 |
24권 1호 |
발표분야 |
포스터-디스플레이 |
제목 |
Highly Stretchable Liquid Metal Interconnects by Photolithography-based patterning |
초록 |
Stretchable and soft electronics are emerging for the next-generation electronic devices. In many previous works, stretchable systems can be achieved by connecting rigid active devices with stretchable electrodes. Therefore, highly conductive and well patterned stretchable electrodes play an important role in those systems. As a promising candidate for stretchable conductors, gallium-based liquid metal has been investigated extensively. Many studies have been conducted to pattern liquid-metal in various ways, but precise patterning of liquid metal was huge difficulty due to its intrinsic properties like high surface tension and thin oxide skin. In this work, we researched the photolithography-based patterning technique for gallium based liquid metals which is compatible to conventional patterning process and applicable to the stretchable interconnects for stretchable systems with feature size under 50um. |
저자 |
강승한1, 조정완2, 김재현1, 남승지1, 박성규1
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소속 |
1중앙대, 2성균관대 |
키워드 |
stretchable electodes; photolithography; gallium-based liquid metal
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E-Mail |
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