| 학회 | 한국재료학회 |
| 학술대회 | 2021년 봄 (05/12 ~ 05/14, 광주 김대중컨벤션센터) |
| 권호 | 27권 1호 |
| 발표분야 | A. 전자/반도체 재료 분과 |
| 제목 | Quantitative in-situ Hygrometry for Reduction Degree Analysis of Molybdenum Oxide Reduction Process |
| 초록 | Molybdenum, one of refinery metals, has various application especially high-tech field such as semiconductor industry. Molybdenum presents in the form of molybdenum disulfide in the ore naturally, and many processes are proceeded to make metal form. Among them, the step that requires high purity and uniform reaction is the process of reducing molybdenum trioxide to molybdenum. The reduction process is a batch-type process in which a reducing gas flows generally. In this case, there is a limitation in that the degree of reactivity of the surface layer and the contact frequency between reducing gas and oxide surface at inner reaction site. Therefore, in order to increase the reaction homogeneity at this stage, the reaction degree can be confirmed by making the contact between the oxide surface and the reducing gas uniform using a rotary tube furnace, and measuring the amount of water vapor as the reaction product to check the reactivity of the internal reactant in real time. In this research, a simple fabrication for 2-step process of highly reduced molybdenum powder for high-tech application was investigated. The reducing process was carried out in a reducing gas atmosphere in a rotary tube furnace, and it was maintained at 500°C for 1 hour. During first heat treatment, MoO3 was reduced to MoO2. After then, furnace temperature was increased to 850°C to reduce from MoO2 to Mo metal powder. The in-situ analysis of molybdenum oxide reduction degree calculated by integrated water vapor amount in outlet gas. The reduced molybdenum powder was characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and inductively coupled plasma (ICP) analysis. |
| 저자 | 송요셉, 이한샘, Haq Muhammad Aneeq, 김범성 |
| 소속 | 한국생산기술(연) |
| 키워드 | Reduction process; Molybdenum; in-situ analysis; Refinery metal |
