| 초록 |
Inkjet printing method is considered as a prominent tool in the area of flexible electronics, transparent oxide electronics, touch panel, and sensor etc. Antimony-doped tin oxide (ATO) film was one of the excellent transparent conducting electrodes, replacing tin-doped indium oxide (ITO). Our research purpose is to fabricate ATO transparent conducting oxide films via ink-jet printing method. We also tried to improve the electrical and optical properties by introducing Ag grids under ATO films. ATO inks (10 nm, Sukyung AT) comprised of ten nanometer-sized ATO powders in ethanol were printed onto glass substrate using inkjet printing process (UNIJET-OJ100). The printed films were heat-treated between 150 and 550oC. Electrical properties of ATO films such as sheet resistance and electrical resistivities were measured via Van der Pauw four probe methods. Optical transmittances were also detected by using UV/Vis photospectroscopy (JASCO V570). In order to further reduce the resistivity of the inkjet-printed ATO films, Ag grids were formed under inkjet-printed ATO films with variations of grid distances. In our study, we found that the sheet resistance of ATO film decreased from a few hundred kOhm/sq at 150oC to 2kOhm at 550oC. But Ag grid confers the decrease of electrical resistance. We think that the inkjet-printing approach is a promising process for the fabrication of transparent conducting oxide films for the future optoelectronic devices. |
