| 학회 |
한국화학공학회 |
| 학술대회 |
2009년 봄 (04/23 ~ 04/24, 광주 김대중컨벤션센터) |
| 권호 |
15권 1호, p.136 |
| 발표분야 |
공정시스템 |
| 제목 |
Delta Operator Approach to Modified Linear Quadratic Gaussian Control: Controller Design and Application to a Commercial 12-inch Rapid Thermal Processing |
| 초록 |
The modified delta-LQG control has been developed to improve the temperature uniformity over the wafer surface in rapid thermal processing (RTP). The objective function of the standard LQG control was modified to include a quadratic penalty term for input deviation from specific bias value which is updated in batch-wise. The numerical ill-conditioning inherent in using the forward-shift operator at high sample rates is minimized by representing the discrete-time system and modified LQG controller in the delta domain. To reduce the heavy computational burden, the components of time-varying gain matrices were approximated to 6th-order polynomial equations over the time trajectories, respectively. UD factorization was introduced to improve the numerical stability for calculating inverse matrix. The proposed method was applied to a commercial 12-inch rotating RTP equipment with 6-pyrometers and 10-circular groups of tungsten-halogen lamps for measurements and manipulation of wafer temperature. |
| 저자 |
원왕연1, 이광순1, 이세찬1, 지상현2, 나병철3
|
| 소속 |
1서강대, 2KORNIC Systems Co., 3Ltd. |
| 키워드 |
Rapid thermal processing; LQG control; Delta operator
|
| E-Mail |
|
| VOD |
VOD 보기 |
| 원문파일 |
초록 보기 |
