| 초록 |
The effective synthesis of Two-dimensional Transition Metal Dichalcogenides (2D TMDCs) at low temperature is essential for their use in flexible devices. In this work, 2D TMDCs was grown directly at a low-temperature of 200 °C on both hard substrates (SiO2) and plastic substrates (PI) using chemical vapor deposition (CVD). We investigated the effect of the growth temperature and M(metals) concentration on layered growth by Raman spectroscopy and microscopy. 2D TMDCs was grown by using lower M condition at low temperature. The optical microscopy, Raman spectroscopy, X-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements indicate that the low temperature CVD 2D TMDCs is layered structure with good uniformity, stoichiometry and controlled layer number. Furthermore, we demonstrated the realization of 2D TMDCs based flexible gas sensor on PI substrate without any transfer process, and the sensor shows competitive sensor performance and mechanical durability at room temperature. This fabrication process could also provide an opportunity for the production of burgeoning flexible and wearable nanotechnology. |
