| 학회 |
한국공업화학회 |
| 학술대회 |
2015년 봄 (04/29 ~ 05/01, BEXCO (부산)) |
| 권호 |
19권 1호 |
| 발표분야 |
디스플레이_포스터 |
| 제목 |
Sn concentration dependence of electrical properties of ITO on PET films prepared by roll to roll sputtering |
| 초록 |
Indium tin oxide (ITO) thin films are widely used transparent conducting oxide (TCO) semiconductor for many applications. It is well known that electrical and optical properties of ITO thin film are strongly dependent on oxygen vacancies and Sn doping ratio. In this study, we report that Sn concentration dependence of electrical and optical properties of indium tin oxide (ITO) films prepared by a roll to roll sputtering process for application of transparent electrodes. The 30 nm thick ITO thin films with Sn contents at 3, 5, 7.5 and 10 wt % were deposited using roll to roll sputter at a fixed 1 % oxygen contents in (Ar+O2) gas and post annealed at 150 ºC for 1hr. We found that the structural and electrical properties of ITO films were strongly depended on Sn concentration of ITO thin film. We suggest that fabrication of the ITO films on polymer substrate for transparent electrodes need a suitable Sn content doped ITO target for high electrical performance in various produce condition of optoelectronic devices |
| 저자 |
김철환, 이상진, 백종현, 조성근, 최우진, 김광제, 함동석, 이재흥
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| 소속 |
한국화학(연) |
| 키워드 |
ITO; Transparent conducting oxide; Roll to roll sputtering
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| E-Mail |
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