| 학회 |
한국재료학회 |
| 학술대회 |
2017년 봄 (05/17 ~ 05/19, 목포 현대호텔) |
| 권호 |
23권 1호 |
| 발표분야 |
C. 에너지 재료 분과 |
| 제목 |
RF 스퍼터링법으로 증착한 셀레늄화안티모니 박막 특성에 대한 기판온도의 영향 |
| 초록 |
Antimony selenide (Sb2Se3) have received a great deal of attention in the last few years, due to the switching effects and its good photovoltaic and thermoelectric properties. The optical and electrical studies of thin films provide an important information about the internal electronic structure of the deposited non-crystalline materials and their crystallization process. This information helps in their industrial application. In this study, Sb2Se3 thin film were prepared by radio frequency magnetron sputtering at substrate temperatures (Ts) from 100-350 ℃. The effect of substrate temperature on the structural, electrical and optical properties of Sb2Se3 thin films was investigated. The films have polycrystalline structure as identified by X-ray diffraction analysis. The optical investigation of films showed a shift in the optical absorption coefficient (α) spectra at the high-energy region. The optical gap decreases (1.65 to 1.35 eV) by decreasing the substrate temperature of the deposited films as Ts increases from 100–350 ℃. The electrical properties are affected by substrate temperature. |
| 저자 |
박건태1, 정운환2, 신상수2, 손영국1, 손창식2, 황동현2
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| 소속 |
1부산대, 2신라대 |
| 키워드 |
Sb<SUB>2</SUB>Se<SUB>3</SUB>; sputtering; substrate temperature; solar cell
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| E-Mail |
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