| 초록 |
Four polymer films(poly(styrene), poly(α-methyl styrene), poly(methyl methacrylate), poly(4-vinylpyridin)) with different interactions with Si wafers were investigated with the X-ray reflectivity (XRR) method. The electron density profile of each film was obtained by fitting the results of the XRR measurements. A new data correction technique that uses the vertical real beam profile and a fitting method that uses the Distorted Wave Born Approximation were combined to overcome the sensitivity limitations of XRR analysis. The results show that the interactions between the polymer films and the Si substrates are strongly correlated with the density profiles of the films near the interfaces. Two types of electron density profiles were found that are characterized by the polarity of the pendant group of the polymer. The reproducibility and credibility of the fitting technique were also thoroughly tested. |
