| 초록 |
Photo-conductive properties of CdS thilm films deposited on glass glass substrates at room temperature using various H2/(Ar+H2) folw ratios by an rf magnetron sputtering. Through the investigation of the structural and photoconductivity properties of CdS thin films by an addition of hydrogen, the relationship between photo- and dark- sheet resistance in CdS thin films was investigated in detail. sulfur concentration in CdS films crystaillized at room temperature with (002) preferred orientation depends directly on the hydrogen atmosphere and the surface roughness of the films gradually increase with increasing hydrogen atmosphere. The dark- and photo-sheet resistance values of CdS thin films were related with a composition, surface roughness, and defect sites with the band gap. |
