| 학회 |
한국화학공학회 |
| 학술대회 |
2003년 봄 (04/25 ~ 04/26, 순천대학교) |
| 권호 |
9권 1호, p.1054 |
| 발표분야 |
재료 |
| 제목 |
Generation of Submicron-scale Structure by Composite PDMS Molds |
| 초록 |
In this work, we described microcontact printing (µcp) of submicron-scale structures using composite PDMS molds. Photoresist patterns produced with photolithography have been treated with controlled undercutting by wet etching to generate submicron-scale shapes. Composite PDMS molds consist of a thin, hard PDMS and a soft, flexible PDMS have been fabricated on submicron-scale mask above to pattern SAMs on metal substrates. From this, it is certified that the combination of composite PDMS mold and undercutting technique plays a significant role to the generation of a clear submicron-scale SAM pattern on metal substrate. Acknowledgement: This work was supported by a grant(M102KN010001-02K1401-00212) from Center for Nanoscale Mechatronics & Manufacturing of 21st Centry Frontier Research Program. |
| 저자 |
유형균1, 최대근1, 양승만1, 조정대2, 이응숙2
|
| 소속 |
1한국과학기술원 생명화학공학과, 2한국기계(연) |
| 키워드 |
Microcontact Printing; Hard PDMS Mold; Wet Etching; SAM
|
| E-Mail |
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