| 초록 |
High purity silane (SiH4) is used for producing high pure polycrystalline silicon. The quality of semiconducting silicon is mainly determined by the purity of silane. The best method to prepare ultra-high grade silane is distillation, because the boiling point of silane is lower than those of all chlorosilanes and impurities such as chlorides and hydrides of boron, phosphorus, and arsenic. The silane can be obtained by redistribution of trichlorosilane in promising method for it. According to the literature the best catalyst for the disproportionation of trichlorosilane are ion-exchange resins combining catalytic active functional group such as tertiary amine or quaternary ammonium salt group. New type catalysts system containing a heterocyclic base as functional group at polystyrene resin were synthesized. And then the redistribution activity of the various catalysts was tested under various conditions (reaction temperature, contact time). Among the commercial catalysts, the Amberlyst A21 catalyst in the best catalyst for the redistribution. |
