| 학회 |
한국공업화학회 |
| 학술대회 |
2011년 가을 (11/02 ~ 11/04, 경원대학교) |
| 권호 |
15권 2호 |
| 발표분야 |
[에너지저장변환 |
| 제목 |
Redistribution reaction of trichlorosilane |
| 초록 |
Silane is one of the most important starting materials used to producing semiconducting silicon and epitaxial structure on its base. The quality of semiconducting silicon is mainly determined by the purity of silane. The highest-purity silane can be obtained by disproportionation of trichlorosilane in the presence of a catalyst.according to the researchthe best catalyst for disproportionation of trichlorosilane are anion-exchange resins combining high activity of functional group. we will discuss about catalytic activity of some commercial anion-exchange resins and reaction condition. |
| 저자 |
이동원1, 한준수2, 유복렬2, 이명의1
|
| 소속 |
1연세대, 2한국과학기술(연) |
| 키워드 |
silane; redistribution; polysilicon
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| E-Mail |
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