| 초록 |
In this study, experiments of a nickel elecroplating were performed in a supercritical plating system using CO2 as a supercritical fluid. Electrolyte and surfactant were important parameters for this plating process. Resistivity values were measured as 60, 35, and 22 Ω at 20, 30, and 50 wt% electrolyte, respectively, and over 60 wt%, the resistivity value was kept constant at 20 Ω. Surface properties of nickel film electroplated by the 60 wt% electrolyte solutions with 2 wt% surfactant were better than any other ratio. The effect of temperature and pressure on the plating in supercritical CO2 were investigated with an increasing temperature from 20℃ to 60℃ and an increasing pressure from 7 MPa to 15 MPa. The surface morphology, roughness, and crystal structure by plating were measured with SEM, roughness tester, and XRD, respectively. The property of plated film was the best at 12MPa and 45 ℃. |
