| 학회 |
한국화학공학회 |
| 학술대회 |
2022년 봄 (04/20 ~ 04/23, 제주국제컨벤션센터) |
| 권호 |
28권 1호, p.1133 |
| 발표분야 |
[주제 12] 화학공학일반(부문위원회 발표) |
| 제목 |
Fabrication of Organic Light Emitting Diode Micropixels by Self-Aligned Imprint Lithography and Plasma-Etch Processes |
| 초록 |
A micron-sized organic light-emitting diode (OLED) pixel array was fabricated without the use of photolithography. The OLED pixels were patterned down to a size of 40 μm using imprint lithography and plasma etching. The imprinted mold has a three-dimensional four-layer structure and the OLED pixels were fabricated by removing each layer in order. In order to separately drive the patterned OLED pixels, a through-hole was drilled in the pixel and filled with an anode metal so that the anode electrode was located in the same plane as the cathode electrode. The anode and cathode electrodes for the operation of the OLED were separated using a simple lift-off process. The feasibility of the fabrication process was verified by operating a larger OLED pattern fabricated by the same process. In this study, it was shown that a high-resolution OLED pixel array can be fabricated using the proposed simple process without using a photolithography process. |
| 저자 |
박형기, 나창연, 이한길, 박성민, 조성민
|
| 소속 |
성균관대 |
| 키워드 |
공정시스템(Process Systems Engineering) |
| E-Mail |
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| 원문파일 |
초록 보기 |
