| 학회 |
한국공업화학회 |
| 학술대회 |
2022년 봄 (05/11 ~ 05/13, 제주국제컨벤션센터(ICC JEJU)) |
| 권호 |
26권 1호 |
| 발표분야 |
포스터-고분자 |
| 제목 |
Eco-friendlySynthesis of Cross-linkable Poly(Amic Acid) Salt for Photo-patternablePolyimide |
| 초록 |
Poly(amic acid) salt (PAAS) pairedwith a photo-cross-linkable organic base is the precursor for photo-patternablepolyimide. The photo-sensitive PAAS (PS-PAAS) reduces the process cost andsimplifies the lithography process by avoiding the use of a photoresist.Typically, the PAAS is synthesized via the salt-forming process of poly(amicacid) that is synthesized in an organic solvent. This causes environmentalpollution and the cost of the material. In here, we propose the one-stepsynthesis of PS-PAAS using water as solvent. The polymerization was conductedin the aqueous solution of an organic base to synthesize the PS-PAAS varnish.The resulting polymer was successfully cross-linked by exposing UV-lightallowing us to prepare the micrometer-sized pattern. Through the thermalimidization process, the polyimide pattern was successfully prepared todemonstrate the potential of the PS-PAAS as a material for eco-friendmicroelectronics. |
| 저자 |
이효은1, 박종민1, 김윤호1, 원종찬1, 조정호2, 김진수1
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| 소속 |
1한국화학(연), 2연세대 |
| 키워드 |
Eco-friendly; Photosensitive polyimide
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| E-Mail |
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