| 학회 |
한국고분자학회 |
| 학술대회 |
2014년 봄 (04/10 ~ 04/11, 대전 컨벤션센터) |
| 권호 |
39권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Nanopattering of Silicon via Block copolymer lithography and It's application for Biosenser |
| 초록 |
Block copolymer lithography, a nanopatterning technology that exploits macromolecular self-assembly, is a promising candidate to overcome the inherent resolution limits of traditional photolithography. In this work, a nanopatterned electrical silicon biosensor is fabricated by BCP lithography and is used for the selective detection of similar structure model proteins. A cost-effective and large-area nanofabrication, based on BCP self-assembly and single-step dry etching, is developed for the hexagonal nanohole pattering of thin silicon films. The resultant nanopatterned electrical channel modified with biotin molecules successfully detects the two proteins, streptavidin and avidin down to nanoscale molarities (~1 nM). This nanofabrication based on scalable self-assembly approaches with a simple process offers a high throughput manufacturing route for clinical lab-on-a-chip diagnosis and relevant bimolecular studies |
| 저자 |
진형민1, 정창규2, 김주영2, 백정은1, 김상욱2
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| 소속 |
1기초과학(연), 2KAIST |
| 키워드 |
Block copolymer; Biosensor; lithography; Self-assembly
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| E-Mail |
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