| 초록 |
There are various manufacturing processes of pure SiO2 that is used as abrasives, chemicals, filters, glasses, metallurgy and optical industries. In an optical fiber industry, to produce SiO2 preform, SiCl4 is utilized as a raw material. However, a combustion reaction of SiCl4 has caused critical environmental issues such as ozone deficiency by chlorine compounds, the greenhouse effect by carbon dioxide and corrosive gas like as hydrochloric acid. Thus, alternative source without those environmental issues is important for the future. Octamethylcyclotetrasiloxane (OMCTS or D4) as a chlorine free source is recently promising candidate for the SiO2 preform formation. In this study, we conducted first a vaporizer design to vaporize the OMCTS. The vaporizer for the OMCTS vaporization was produced based on the results of the vaporizer design. The size of the primary particle of the SiO2 formed by OMCTS was less than 100 nm. X-ray diffraction patterns results of the SiO2 indicated amorphous phase. From Fourier-transform infrared spectroscopy analysis, the Si-O-Si bond was found without the -OH group. |
