| 학회 |
한국화학공학회 |
| 학술대회 |
2008년 봄 (04/23 ~ 04/25, 제주ICC) |
| 권호 |
14권 1호, p.1029 |
| 발표분야 |
열역학 |
| 제목 |
Phase Behavior of Amine Compound with Fluorosurfactant in Supercritical Carbon Dioxide |
| 초록 |
Cloud point of the Amine Compound with Fluorosurfactant in Supercritical Carbon Dioxide has been investigated. The amine Compound was used as additives for the supercritical carbon dioxide, because only CO2 could not remove completely photo resist used for semiconductor manufacturing process. The cloud point is a necessary factor for Supercritical CO2 Resist Removal (SCORR) process. The cloud points were measured using a high pressure variable-volume view cell. All systems exhibited a lower critical solution temperature phase behavior and became one-phase in carbon dioxide in the range of 313.15 to 353.15 K at less than 40 MPa. |
| 저자 |
원종우, 유기풍, 임종성, 장원호, 한갑수
|
| 소속 |
서강대 |
| 키워드 |
Cloud point; Supercritical fluid
|
| E-Mail |
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| 원문파일 |
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