| 학회 |
한국화학공학회 |
| 학술대회 |
2013년 봄 (04/24 ~ 04/26, 광주 김대중컨벤션센터) |
| 권호 |
19권 1호, p.786 |
| 발표분야 |
재료 |
| 제목 |
Enhanced Adhesion Strength of ZnO Nanopillar Arrays of Flexible Substartes for Artificial Basilar Membrane |
| 초록 |
Piezoelectric zinc oxide (ZnO) nanopillar arrays were grown on flexible substrates to make an artificial basilar membrane (ABM) which has a xylophone-like structure. The ZnO nanopillars were synthesized in solution at low temperatures (＜ 100 oC). To selectively fabricate the xylophone-like ABM structure, a hybrid approach combining top-down photolithography and bottom-up chemical growth has been used. A special concern was focused on the adhesion enhancement of ZnO nanopillar arrays on a flexible substrate. Strong adhesion of nanopillars on polyimide was achieved by oxygen-plasma treatment followed by fluorinated-carbon deposition on the plasma-treated substrate. The characterization of ZnO nanopillar arrays and the process optimization of ABM fabrication have been carried out in terms of structural and electrical properties. |
| 저자 |
김련탁, 홍아라, 한윤봉, 안민선
|
| 소속 |
전북대 |
| 키워드 |
ZnO nanopillar; Piezoelectric; Flexible Substrate
|
| E-Mail |
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| 원문파일 |
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