| 학회 |
한국재료학회 |
| 학술대회 |
2010년 가을 (11/11 ~ 11/12, 무주리조트) |
| 권호 |
16권 2호 |
| 발표분야 |
F. Display and optic Materials and processing(디스플레이 및 광 재료) |
| 제목 |
Optical Emission Spectroscopy of Atmospheric Pressure cold Plasma And Fabrication of ZnO films. |
| 초록 |
Under open-air atmospheric pressure homogeneous non-equilibrium cold plasma was generated stably by high voltage pulsed power (1 kV, 20 kHz) excitation of a mixture of He and O2 gases. By feeding Zn-MOPD (C18H30O6Zn) with He carrier gas into this plasma system transparent flat ZnO thin films about 250 nm thick were successfully fabricated on glass substrates. The film was fabricated directly under the slit made into the cathode. Plasma species were observed by optical emission spectroscopy. N2 molecular, He and O atomic species were present in the plasma. In addition, atomic species of O and He increased by increasing the input voltage. The bombardment of the high energy ions at high input voltage may change the growth pattern of ZnO film and its structure. |
| 저자 |
Yoon-Kee KIM1, Dong-Bum SHIN2
|
| 소속 |
1Department of Welding & Production Engineering, 2Hanbat National Univ. |
| 키워드 |
Plasma deposition; Zinc oxide; Atmospheric pressure cold plasma; He & Oxigen gases
|
| E-Mail |
|
