화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2016년 봄 (04/06 ~ 04/08, 대전컨벤션센터)
권호 41권 1호
발표분야 고분자가공/복합재료
제목 A Density-Controlled Polyimide Nanotips Array on Substrates using Block Copolymer Micelle Lithography
초록 We report a new fabrication method to prepare polymer nanotips array on diverse substrates by plasma etching with polystyrene-block-poly(acrylic acid) (PS-PAA) block copolymer micelles incorporating Au nanoparticles inside (Au@PS-PAA). Adsorption density of Au@PS-PAA micelles onto polyelectrolyte multilayers (PAH/[PSS/PAH]2) deposited on polyimide (PI) films was controlled by adjusting pH condition of micellar solutions, which influence molecular interaction between carboxylic acid in the PAA coronas and amine group in PAH located at the outmost layer on substrates. Since the Au nanoparticles in the micellar structure can provide etching resistance, only the polymer layers underneath Au nanoparticles remain intact during plasma treatment. After CF4 plasma etching, well-ordered and free-standing PI nanotips arrays were obtained on a 2-inch substrate.
저자 이경원1, 양승윤1, 이승현1, 유성일2, 김장환2
소속 1부산대, 2부경대
키워드 Polyimide; Nanotip array; block copolymer lithography; Polyelectrolyte multilayer
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