| 초록 |
Flexible electronics is a technology for assembling electronic circuits by mounting electronic devices on flexible plastic substrates, such as polyimide, PEEK or transparent conductive polyester film. Polyimide(PI) having permeability, temperature resistance, and flexibility has been widely used in fuel cells, displays, sensor and military industries. Mechanical simulation modeling of bending stress dispersion of amorphous indium-gallium-zinc oxide (a-IGZO) thin film transistor (TFT)-deposited devices on a flexible PI substrate was performed, and the a-IGZO layer stress according to bending was measured by X-ray diffraction(μXRD) and compared with the simulation values. When comparing the structure of the deposited a-IGZO TFT with an island on the substrate and the convention structure deposited without changing the shape of the PI substrate, it was confirmed that the island structure had little stress. |
