| 학회 |
한국공업화학회 |
| 학술대회 |
2007년 봄 (05/11 ~ 05/12, 계명대학교) |
| 권호 |
11권 1호 |
| 발표분야 |
무기재료 |
| 제목 |
Synthesis and Characterization of Photocurable Epoxy-modified Polyvinylsilazane for Lithography Applications |
| 초록 |
Photocurable preceramic polymers are promising materials to fabricate the non-oxide ceramic structures in micro- or nano-scale using various lithography techniques because of their outstanding chemical and physical stability. In this work, we reported the UV-curable inorganic polymers were synthesized by hydrosilylation reaction of polyvinylsilazane (KiON) and allyl glycidyl ether in the presence of Karstedt’s catalyst. The properties of the synthesized polymers such as the photosensitivity, thermal stability and ceramic yield were comparatively characterized using various instruments which investigated for the future MEMS applications. The morphology of the SiCN-based ceramic structures was characterized by Scanning Electron Microscopy (SEM). |
| 저자 |
Pham Anh Tuan, 김동표
|
| 소속 |
충남대 |
| 키워드 |
photocurable inorganic polymer; hydrosilylation; lithography
|
| E-Mail |
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