| 학회 |
한국재료학회 |
| 학술대회 |
2007년 봄 (05/10 ~ 05/11, 무주리조트) |
| 권호 |
13권 1호 |
| 발표분야 |
에너지 환경재료 |
| 제목 |
Porous noble metal thin films fabricated by DC reactive magnetron sputtering |
| 초록 |
We deposited AuO and PtO films having thickness of 170nm by DC oxygen reactive magnetron sputtering on SiO2 substrate. The AuO and PtO thin films were deposited with unstable bonds which were between Au and oxygen or between Pt and oxygen. On entire deposited films, oxygen atoms are decomposed and outgassed during proper thermal treatment, and then porous Au and Pt thin films were formed after heat treatment. At this time, the conditions of heat treatment temperature and time were changed. The adhesion of AuO and PtO films were better than that of dense Au and Pt films on SiO2 substrate and it was also shown same results in porous Au and Pt films after heat treatment. The porosity of thin films was increased with increasing heat treatment temperature and time. To investigate the possibility of using the films for high temperature SOFCs, we increased the thickness of AuO and PtO films and then annealed at 800oC for 30 hours. The porous Au and Pt thin films for electrode or current collector were kept porous structures. |
| 저자 |
Tae Shin Cho1, Sun Hee Choi2, Keonseok Oh1, Sung Woo Kang2, Jong-Ho Lee1, Hae-Weon Lee2, Joosun Kim1
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| 소속 |
1Center for Energy Materials Research, 2Korea Institute of Science and Technology |
| 키워드 |
AuO; Au; PtO; Pt; Sputtering; Porous thin film; SOFC
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| E-Mail |
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