| 학회 | 한국재료학회 |
| 학술대회 | 2004년 가을 (11/05 ~ 11/05, 인하대학교) |
| 권호 | 10권 2호 |
| 발표분야 | Sensor |
| 제목 | MEMS 기술로 제작된 비냉각형 적외선 센서 |
| 초록 | Uncooled infrared (IR) detectors that use a microbolometer with a large focal plane array (FPA) have been developed with micromachining technology, which can lead to various 3-dimensional micro structures. Performance of the microbolometer is determined by many parameters such as IR absorption, temperature coefficient of resistance (TCR) of bolometric materials, thermal isolation, and noise properties. Of all these, the properties of TCR and device resistance are very important factors for high detectivity in microbolometers. In this paper, Novel infrared absorbing material for uncooled microbolometer was developed and microbolometer was designed and fabricated using the new bolometric material. The new infrared absorbing material was fabricated based on a formation of the vanadium-tungsten thin film and its low-temperature oxidation. New bolometric material have a TCR values in range of -1.5 ∼ -4.0 %/K as the variation of tungsten concentration and oxidation time. Novel infrared absorbing material coupled microbolometer was fabricated by surface micromachining and its bolometric properties were characterized. Responsivity and noise voltage were measured as a function of chopper frequency and detectivity of 0.9 ∼ 6.0×108 ㎝㎐1/2/W were obtained at chopper frequency of 10 ∼ 100㎐ and bias current of 33㎂. |
| 저자 | 한용희1, 최인훈1, 김근태2, 신현준2, 문성욱2, 안미숙2, 김신근2, 오명환3 |
| 소속 | 1고려대, 2KIST 마이크로시스템 연구센터, 3단국대 |
| 키워드 | MEMS; uncooled infrared sensor; bolometer |
