| 초록 |
In this study, NiCr thin film has been developed to control the resitivity and temperature coefficients of resistance (TCR). The experiments were conducted under various input power in order to find the optimum conditions to achieve a high resistivity and low TCR and also to evaluate the thermal stability of NiCr thin film, the heat treatment was progressed at various temperatures. As a result, high resistivity were obtained and stable TCR were obtained. Heat treatment results, the thermal resistance increases as the temperature was increased and TCR value was decrease. |
