| 학회 |
한국고분자학회 |
| 학술대회 |
2009년 봄 (04/09 ~ 04/10, 대전컨벤션센터) |
| 권호 |
34권 1호 |
| 발표분야 |
분자 자기조립에 의한 나노기술 |
| 제목 |
Neutral Parameter Window for Perpendicularly Oriented Block Copolymer Resists Deposited on Organosilicate Substrates with Tunable Surface Energy |
| 초록 |
In order to use block copolymer (BCP) films with perpendicularly oriented microdomains as templates for nanofabrication, we need to balance the interfacial interactions of a BCP. However, perpendicular orientation of microdomains is quite sensitive to the film thickness. In this presentation, we investigated the effect of film thickness on the orientation of microdomains in lamellae-forming P(S-b-MMA) thin films placed on thermally cured organosilicate (OS) substrates. We will demonstrate the origin of the observed thickness effect by taking into account the increase in surface area at the free surface when P(S-b-MMA) films make holes or islands depending on the incommensurable conditions of the BCP film. This analysis allows us to define a more accurate neutral window for the P(S-b-MMA) in terms of both substrate surface energy and BCP film thickness. |
| 저자 |
서효선1, 차국헌1, 강희만2, Paul F. Nealey2
|
| 소속 |
1서울대, 2Univ. of Wisconsin |
| 키워드 |
block copolymer; organosilicate; thin film
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| E-Mail |
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