학회 |
한국재료학회 |
학술대회 |
2007년 가을 (11/02 ~ 11/02, 성균관대학교) |
권호 |
13권 2호 |
발표분야 |
전자재료 |
제목 |
Hysteresis characterization of PVPh(polyvinylphenol) films through various cross-linking condition |
초록 |
Thin films of PVPh(polyvinylphenol) were prepared by spin coating on p-Si substrate. FT-IR was used to confirm the cross-linking reaction of PVPh. Cross-linking behavior between PVPh and melamine agent could be known to find out the chagne of hydroxyl peak in FT-IR. The results show that the content of the cross-linking reaction could be changed the final temperature, time, step process at annealing. Capacitance-voltage (C-V) and current-voltage (I-V) behavior of the Au/ PVPh/ p-Si MIS (metal-insulator-semiconductor) structure was studied and dielectric constant of the PVPh film was measured to be about 4.5 at optimum condition. Hysteresis was observed in the C-V curve for films as deposited and annealed(70-500ºC). The causes of hysteresis behavior could be find out by comparison with sweep direction and shape. |
저자 |
Dongkyu Lee1, Shi-Woo Rhee2
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소속 |
1Laboratory for Advanced Molecular Processing (LAMP), 2Department of Chemical Engineering |
키워드 |
PVPh(polyvinylphenol); hysteresis; C-V
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E-Mail |
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