| 학회 |
한국고분자학회 |
| 학술대회 |
2014년 봄 (04/10 ~ 04/11, 대전 컨벤션센터) |
| 권호 |
39권 1호 |
| 발표분야 |
고분자구조 및 물성 |
| 제목 |
Device-oriented Complex Nanostructures by Block Copolymer Lithography |
| 초록 |
Complex nanopatterns integrating diverse nanocomponents are crucial requirements for advanced photonics and electronics. We present multicomponent nanopatterns enabled by block copolymer (BCP) self-assembly, which offers device oriented sub-10-nm scale nanopatterns with arbitrary large-area scalability. In this approach, BCP nanopatterns direct the nanoscale lateral ordering of the overlaid second level BCP nanopatterns to create the superimposed multicomponent nanopatterns incorporating nanowires and nanodots. This approach introduces diverse chemical composition of metallic elements including Au, Pt, Fe, Pd, and Co into sub-10-nm scale nanopatterns. As immediate applications of multicomponent nanopatterns, we demonstrate multilevel charge-trap memory device with Pt-Au binary nanodot pattern and synergistic plasmonic properties of Au nanowire-Pt nanodot pattern. |
| 저자 |
차승근1, 신동옥2, 문정호1, 김주영1, 김상욱1
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| 소속 |
1한국과학기술원, 2ETRI |
| 키워드 |
block copolymer; self-assembly; nanopattern; plasmonic
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| E-Mail |
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