화학공학소재연구정보센터
학회 한국재료학회
학술대회 2010년 봄 (05/13 ~ 05/14, 삼척 팰리스 호텔)
권호 16권 1호
발표분야 E. Frontiers of Materials Research(선도 재료연구)
제목 Growth and Electrical Properties of (Sr1-x, Lax)TiO3 Ultra-thin Films on SrTiO3
초록  We have made (Sr1-x, Lax)TiO3 (SLTO) ultra-thin films on SrTiO3 with various thicknesses on  Ti-O terminated SrTiO3 substrate using Laser-Molecular Beam Epitaxy(Laser-MBE). The growth was in situ monitored by specular spot intensity oscillation in reflection high energy electron diffraction (RHEED). We investigate the effect of film thickness on the structural and electrical properties of the thin films. It was found that the electrical resistivity increased from 1.86 × 10-3 Ωcm to 1.298 × 103 Ωcm with decreasing the film thickness from 50 unit cell to 2 unit cell. We also confirmed Metal-Insulator transition (M-I Transition) at a critical thickness. The critical thickness also depended on the existence of SrTiO3 capping layer on the top of the SLTO layer.  The comparison of electrical properties between the bare and capped SLTO layer is made and discussed in this study.

 
저자 윤종현, 최의영, 이재찬
소속 성균관대
키워드 SrTiO3; SLTO
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