| 학회 |
한국재료학회 |
| 학술대회 |
2011년 가을 (10/27 ~ 10/29, 신라대학교) |
| 권호 |
17권 2호 |
| 발표분야 |
B. Nanomaterials and Processing Technology(나노소재기술) |
| 제목 |
Crystallized indium tin oxide thin films at a low temperature on polymer substrate by Off-axis RF Magnetron Sputtering |
| 초록 |
In this study, off-axis RF magnetron sputtering was used for the crystallized ITO thin films at a low temperature of about 120℃ instead of the conventional RF sputtering because the off-axis sputtering can avoid the damage for the plasma as well as fabrication of thin films with a high quality. The structural, optical and electrical properties of the obtained films depending on deposition parameters, such as sputtering power, gas flow and working pressure, have been investigated. The ITO thin films grown on PET substrate at 120℃ were crystallized with a (222) preferred orientation. 100-nm thick ITO films showed a resistivity of about 4.2×10-4Ω-cm and a transmittance of about 81% at a wavelength of 550nm. The transmittance of the ITO thin films by an insertion of SiO2 thin films on ITO films was improved. |
| 저자 |
최형진, 정현준, 윤순길
|
| 소속 |
충남대 |
| 키워드 |
ITO; TCO; Off-axis Sputtering; PET
|
| E-Mail |
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