| 초록 |
Block copolymers with various nanodomains, such as spheres, cylinders, and lamellae have received great attention for their applicability to nanolithography and high density storage devices. However, nanodomains having a single shape are only achieved at a given block copolymer, because the volume fraction of one of the blocks in a block copolymer thermodynamically controls its nanodomains. In this study, we synthesized a novel miktoarm block copolymer capable of cleavage of one block chain by ultraviolet. By ultraviolet irradiation, original cylindrical nanodomains were successfully transformed to lamellar nanodomains. We demonstrated thin film showed perpendicularly oriented cylindrical and lamellar nanodomains; thus dual-nanopatterns consisting of dots and lines were fabricated at desired regions on a single substrate. Since the dual nanopatterns are easily obtained in a large area, this technique could be employed as next-generation nanolithography. |
