| 학회 | 한국재료학회 |
| 학술대회 | 2012년 가을 (11/07 ~ 11/09, 라카이샌드파인 리조트) |
| 권호 | 18권 2호 |
| 발표분야 | B. 나노재료(Nanomaterials) |
| 제목 | Morphology Control of Ordered Si-Nanowire Array by Nano-Sphere-Lithography and Metal-Assisted Chemical Etching |
| 초록 | Si-based nanostructures have been noticed as promising building blocks for future semiconductor industry. Among the various nanostructures, one-dimensional (1-D) silicon nanowires (SiNWs) have attracted a lot of attention because of their unique physical and chemical properties, and potential applications in many areas such as electronic, optoelectronic devices, bio- and chemical sensors, and advanced solar cell devices. Numerous methods have been developed to fabricate SiNW array with precise diameter, length, and high-aspect ratio since these parameters directly impact on properties of SiNW array. Among these methods, Metal-Assisted Chemical Etching (MacEtch) with Nano-Sphere-Lithography (NSL) technique has attracted intense attention for several years. NSL is inexpensive(less than $1 per sample), simple to implement, and inherently parallel method which is materials general nanofabrication technique to capable of producing an unexpectedly large variety of well-ordered 2-D nanostructure array. MacEtch is simple and low-cost way to fabricate various Si-based nanostructures with controlled parameters (e.g., cross-sectional shape, diameter, length, orientation, doping type and doping level) without expensive equipment. However, SiNWs fabricated by this method with controlled morphology haven’t been reported so far. In this research, we succeeded to fabricate SiNW array with controlled morphology by MacEtch with NSL technique. It may be the first time to show morphology change from cylindrical shape to con-like (tapered) shape. These results will give more possibility to construction of versatile Si-based nanostructures. |
| 저자 | Tae-Yeon Hwang1, Guk-Hwan An2, Jae-Hong Lim3, Nosang V. Myung2, Yong-Ho Choa4 |
| 소속 | 1Department of Chemical Engineering, 2Hanyang Univ., 3Department of Fusion Chemical Engineering, 4Electrochemistry Department |
| 키워드 | Silicon nanowire; metal-assisted chemical etching; cone-like (tapered) nanowire |
