| 학회 | 한국재료학회 |
| 학술대회 | 2008년 봄 (05/22 ~ 05/23, 상록리조트) |
| 권호 | 14권 1호 |
| 발표분야 | 전자재료 |
| 제목 | Simulation of atomic force microscopy operation via 3D finite element modelling |
| 초록 | In this study, numerical modelling of a micro scale friction measurement method by atomic force microscopy (AFM) is presented. Numerical modelling of AFM experiment is presented with the aim of exploring friction mechanisms at the micro scale. As a starting point for this work, comparisons between FE (finite element) models and previously reported mathematical models for stiffness calibration of cantilevers (beam and V-shaped) are presented and discrepancies highlighted. A colloid probe model1 was developed and its normal and shear interaction were investigated exploring the response of the probe accounting for inevitable imperfections in its manufacture. The material properties of the cantilever had significant impact on both normal and lateral response, even local yielding was found in some areas. The sensitivity of the response in both directions was explored and found that it was higher in normal than in lateral. In lateral measurement, generic response stages were identified, comprising a first stage of twisting, followed by lateral bending, and then slipping. This was present in the two cantilever types explored (beam and V-shaped). Additionally, an emulation model was designed to explore dynamic sensitivity by comparing the simulation of a hysteresis loop with previously reported experiment and the results show good agreement in response pattern. The ability to simulate the scan over an inclined surface representing the flank of an asperity was also demonstrated. Experimental works have been attempted for exploring issues of importance in friction measurement including establishing dynamic sensitivity. ------------------------------------------------------------------------------------------------------------------------------1 A colloid probe comprises a plain cantilever on which a particle is adhered. |
| 저자 | 최진일, D.T.Gethin |
| 소속 | Swansea Univ. |
| 키워드 | AFM; FEM; cantilever stiffness calibration; colloid probe; dynamic sensitivity |
