화학공학소재연구정보센터
학회 한국재료학회
학술대회 2019년 봄 (05/15 ~ 05/17, 평창 알펜시아 리조트)
권호 25권 1호
발표분야 E. 환경/센서 재료 분과
제목 Growth of WOx nanorods by mechanical stress
초록 Research on ultraviolet (UV) light detection has attracted considerable attention from scientific researchers in related fields. It can be said that it is a very important time to accurately monitor the UV irradiation amount according to the wavelength region in real time. The oxide is very diverse in its kind and has the advantage of being able to efficiently control the band gap through band gap engineering. In addition, it is very stable in response to heat and atmospheric oxygen when UV is absorbed. Also, there is a known method that can effectively manufacture oxide nanoparticles and nanorods through various synthesis methods, and researches for improving the sensitivity of UV sensors have been carried out using this method. Tungsten oxide is a representative material of oxide photocatalyst which is recently studied. It has a band gap of 3.0 eV or more, and its electrical conductivity changes very sensitively during UV irradiation. Because of its n-type nature and excellent electrical conductivity, research results have been reported showing high current flow in the nA region when irradiated with nanorods. The nanorods were grown using a conventional two step process. First, a 10-nm-thick WOx film was deposited on a (100) Si substrate by electron-beam evaporation using 99.9% WO3 powder as an evaporation source. The substrate was then loaded into a furnace and annealed at temperatures above 700 °C in a low-pressure environment with 40 sccm flowing He. the driving force for the growth of nanorods is compressive stress induced from the difference in thermal expansion coefficients. a major benefit of our approach is high process compatibility due to low growth temperature. Moreover, this growth method does not require any precursor or catalyst.
저자 Se Young Jeong1, Hak Ki Yu2
소속 1matarial science and engineering. Ajou Univ., 2Material science and engineering. Ajou Univ.
키워드 tungsten oxide; nanorods; eco friendly synthesis process; mechanical stress; UV sensor
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