화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2022년 봄 (04/06 ~ 04/08, 대전컨벤션센터)
권호 47권 1호
발표분야 고분자합성
제목 Photothermally Cross-linked Hexanuclear Oxozirconium Cluster as an Organic-Inorganic Hybrid Dielectric Material
초록 A hybrid structure of organic and inorganic building blocks enables us to design and tailor new materials with desired features and functions. We adopt a photothermally activated, cross-linked, and stable metal-oxo cluster molecular assembly based on hexanuclear zirconium-oxo cluster which can be a suitable for a new dielectric material since the metal core enhances the dielectric functionality and together the organic ligand imparts a polymerizable functionality. The hexanuclear zirconium-oxo cluster is synthesized, and its thin film is prepared by a solution process and then photothermally treated with various conditions. Very interestingly, the photothermal activation strategy used in this work enables a direct patterning of the thin film like photolithography. We demonstrate that the photothermally activated zirconium-oxo cluster thin film can be successfully applied to a gate dielectric material for thin-film field-effect transistors with different active layers.
저자 가혜 김, 김명길
소속 성균관대
키워드 oxo clsuter; dielectric materials; photoresist; thin film transistor; organic inorganic hybrid
E-Mail