| 초록 |
The fabrication of inorganic nanostructures has drawn great attention during the last decade due to their potential utilization for highly integrated nanoscale devices. Among various methods, in this work the self-assembly of block copolymers(BCPs), especially the blends of two different BCPSs, was utilized for well-controlled fabrication of inorganic nanostructures. For the purpose, blend films with different composition of two BCPs were produced by spin-coating on the substrates, and through functionalization with inorganic precursor and plasma treatment, inorganic nanostructures with various patterns were produced. Substrate modification and controlling orientation of block copolymer microdomains enable to produce various nanostructures of inorganic materials. All these results indicate that blending of two different BCPs can generate the templates with nanostructures and functionality that cannot be realized with single BCP only. |
