| 학회 | 한국재료학회 |
| 학술대회 | 2018년 봄 (05/16 ~ 05/18, 삼척 쏠비치 호텔&리조트) |
| 권호 | 24권 1호 |
| 발표분야 | 5. 화학센서용 기능성 소재(Chemical sensors)-오거나이저: 장호원 교수(서울대) |
| 제목 | Heterogeneous nanomaterial array for low-power, integrated environmental sensors |
| 초록 | Chemically synthesized one dimensional (1D) nanomaterials have shown unique properties and great promises for numerous applications such as nanoelectronics, display, energy conversion and bio/chemical sensing. However, their real-life commercial applications are still quite limited mainly due to the lack of economic, well-controlled and reliable assembly/integration process on functional devices and systems. Accordingly, various methods such as dielectrophoresis, optical trapping, nanomanipulation and contact printing have been actively developed for the controlled integration and assembly of 1D nanomaterials. However, they still cannot provide high controllability, reproducibility and manufacturing throughput. Furthermore, there exist only weak bonding forces between nanomaterials and device electrodes, greatly limiting their robustness and reliability. In this talk, I will explain an alternative approach called “focused energy field (FEF) synthesis” in order to resolve the abovementioned limitations in the assembly and integration of 1D nanomaterials on functional microelectronic devices. This method is based on a localized, low-temperature and liquid-phase reaction for the selective synthesis and in-situ integration of 1D nanomaterials at desired locations on the microelectronic devices [1]. In specific, the local synthesis and direct integration of nanomaterials is enabled by localized Joule heating at the desired local hot spots, convective heat and mass transfers of precursor solutions and selective endothermal chemical reaction at the hot spots, all in liquid phase. The advantages of this method are (a) direct, self-aligned synthesis of nanomaterials without further assembly or integration steps required, (b) extremely simple and inexpensive setup for the fabrication, (c) minimal requirement of chemicals and energy for the process, (d) realization of mechanically and electrically robust contact between nanomaterials and device substrates and (e) compatibility with flexible polymer substrate due to low temperature and mild chemical process conditions. I will provide in-depth explanation of process mechanisms, fabrication results with mechanical and electrical characterization, and its applications to physical / chemical sensors [2-5]. References: [1] D. Yang, I. Park, et al., Adv. Mater. 27 (2015) 1207. [2] D. Yang, I. Park, et al., Sci. Reports 5 (2015) 8149. [3] D. Yang, I. Park, et al., ACS Appl. Mater. Inter. 7 (2015) 10152. [4] I. Cho, I. Park, et al., ACS Appl. Mater. Inter. 9 (2017) 27111. [5] D. Kim, I. Park, et al., Sens. Act. B. 226 (2015), 579. |
| 저자 | 박인규 |
| 소속 | 한국과학기술원 (KAIST) |
| 키워드 | <P>gas sensor array; metal oxide nanowire; localized synthesis; multiplexed sensor </P> |
