| 초록 |
Non-conventional carbon fiber (C-Fiber) based solar cells have some benefits such as low resistivity of carbon fiber, lightweight, high strength, and flexible property which provides carbon fiber based solar cell with a broad spectrum of applications, especially for clothing-integrated photovoltaic. The properties of Si/C-Fiber hybrid structures for C-Fiber based solar cells are well not understood yet and need further studies. In this study, microstructure and crystallization behavior of silicon film on carbon fiber filament substrate deposited by very high frequency (60MHz) plasma enhanced chemical vapor deposition (PECVD) were investigated. Several properties of carbon fiber such as microstructure and its crystallinity were analyzed. The deposition conditions of PECVD such as silane gas flow rate, hydrogen has flow rate, R.F. power, and process temperature were controlled for controlling crystallinity of silicon film on carbon fiber filament. The crystallinity of silicon film was confirmed by micro-Raman spectrometer and high resolution transmission electron microscopy. It was observed that the crystallinity of silicon film on carbon fiber and graphite fiber filament was higher than that of silicon film on glass fiber filament under the same process condition. Rapid thermal processing was carried out for describing the crystalline behavior of silicon film on carbon fiber filament with respect to temperature. |
