화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2017년 봄 (04/05 ~ 04/07, 대전컨벤션센터)
권호 42권 1호
발표분야 대학원생 구두발표 (영어발표, 발표15분)
제목 Design and Fabrication of Pseudo-3D Microstructures through Reaction-Diffusion-Mediated Photolithography
초록 Three-dimensionally shaped microstructures has featured advanced functionalities in biotechnology, photonics, and self-assembly. We developed a novel lithographic approach to fabricate psuedo-3D microstructures using the reaction-diffusion process. In this work, the Reaction-Diffusion-Mediated Photolithography (RDP) process is further studied to investigate effect of various parameters on growth behavior of microstructure. We expand the use of microstructure to a wide range of structural dimensions and optimize the conditions along with the separation between reaction sites. In addition, we investigate how a lens effect dynamically guides the growth behavior of microstructures in combination with the reaction-diffusion process. High reproducibility and simple experimental setup of the RDP process will open new opportunities to fabricate microparticles or micropattern with unique pseudo-3D structures.
저자 제광휘, 김신현
소속 카이스트
키워드 Pseudo-3D microstructures; Oxygen inhibition; Reaction-Diffusion; Photolithography
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