| 초록 |
In this study, we suggest novel routes by which the size scale of nanostructures can be extended beyond the bounds achievable with the block copolymers alone. One of them is using block copolymer and homopolymer mixture, and the other is by crosslinking the matrix by ozone exposure. Polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) block copolymer thin film was prepared to vertically orient PMMA cylindrical nanodomains to the substrate. Diameter of the generated manholes ranges from a few nanometers to tens of nanometers with good ordering regularity. The nanohole size and lateral distribution are well controlled and predictable with high reproducibility. These nanoholes can be used to make quantum dots array, nano post with high aspect ratio, bio-material separation media, and storage media, etc.. |
