화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2009년 가을 (10/08 ~ 10/09, 광주과학기술원 오룡관)
권호 34권 2호
발표분야 기능성 고분자
제목 Microlens array fabrication using growing into the cylindrical channel under vaccum
초록 Microlens have wide applications in consumer products, such as flat panel displays, digital optical processors, image systems, optical communication. This paper describes a effective method for fabrication of microlens array with controlled surface profiles, using a novel method. The silicon master of micro-cylinder array is prepared using photolithography and the film (PC, polycarbonate) is used to fabricate the plastic microlens array. Using the method, microlens arrays having near spherical curvatures have been successful fabricated. Three processing parameters such as the processing temperature, pressure and time, were varied to study the effects of processing conditions on surface profile of microlens.
저자 박병국, 이한섭, 양이슬, 최기운
소속 인하대
키워드 Microlens; Polycarbonate
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