| 초록 |
A conventional PSPBO can be consisted of photo active compound(PAC), esterified diazonaphthoquinone(DNQ) and PBO precursor, PHA(polyhydroxyamide). The PHA has phenolic hydroxyl group, so that can promote dissolution of the polymer in an aqueous alkaline developer. The hydrogen bonds between hydroxyl group of PHA and DNQ inhibit the dissolution. But, after exposure with UV light, DNQ is converted to indene-carboxylic acid or sulfonic acid compounds which promote dissolution. Because of this phenomenon, the PHA can be used to prepare a positive working photosensitive material in patterning processes. |
