화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2011년 가을 (10/06 ~ 10/07, 김대중 컨벤션센터)
권호 36권 2호
발표분야 Polymer Directed Assembly
제목 Extremely tunable pattern generation using solvent-annealed siloxane block copolymers
초록 An extraordinarily large degree of tunability in geometry and dimension is demonstrated in films of a self-assembled block copolymer. A poly(2-vinylpyridine-b-dimethylsiloxane) block copolymer with highly incompatible blocks was spun-cast on patterned substrates and treated with various solvent vapors. The degree of selective swelling in the poly(2-vinylpyridine) matrix block could be controlled over an extensive range, leading to the formation of various microdomain morphologies such as spheres, cylinders, hexagonally perforated lamellae and lamellae from the same block copolymer. The systematic control of swelling ratio and the choice of solvent vapors offer the unusual ability to control the width of very well-ordered linear features within a range between 6 and 31 nm. This methodology is particularly useful for nanolithography based on directed self-assembly in that a single block copolymer film can form microdomains with a broad range of geometries and sizes.
저자 정재원, 박운익, 정연식
소속 한국과학기술원
키워드 Block copolymer
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