| 초록 |
PDMS microchannels were prepared using soft lithographic process and integrated with glass substrated by simple vapor deposition process of vaporizable silanes, which were evaporated above flash point and diffused into porous PDMS. Amorphous silica network were successfully formed inside PDMS and interface between PDMS and glass by sol-gel reaction of vaporized silane with moisture.Then, wehave coated microchannels with amorphos silica by sol-gel methods for the surface modification of microchannels. |
