화학공학소재연구정보센터
학회 한국재료학회
학술대회 2007년 가을 (11/02 ~ 11/02, 성균관대학교)
권호 13권 2호
발표분야 전자재료
제목 Hysteresis characterization of PVPh(polyvinylphenol) films through various cross-linking condition
초록 Thin films of PVPh(polyvinylphenol) were prepared by spin coating on p-Si substrate. FT-IR was used to confirm the cross-linking reaction of PVPh. Cross-linking behavior between PVPh and melamine agent could be known to find out the chagne of hydroxyl peak in FT-IR. The results show that the content of the cross-linking reaction could be changed the final temperature, time, step process at annealing. Capacitance-voltage (C-V) and current-voltage (I-V) behavior of the Au/ PVPh/ p-Si MIS (metal-insulator-semiconductor) structure was studied and dielectric constant of the PVPh film was measured to be about 4.5 at optimum condition. Hysteresis was observed in the C-V curve for films as deposited and annealed(70-500ºC). The causes of hysteresis behavior could be find out by comparison with sweep direction and shape.
저자 Dongkyu Lee1, Shi-Woo Rhee2
소속 1Laboratory for Advanced Molecular Processing (LAMP), 2Department of Chemical Engineering
키워드 PVPh(polyvinylphenol); hysteresis; C-V
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