| 초록 |
Periodic and hierarchical nanostructures have great potential for various applications, especially for photonic biosensors. However, fabrication of hierarchical nanostructures still remains a challenge because most current technologies involve time-consuming and complex fabrication processes. Here, we report a simple and cost-effective process for creation of unique and complex nanostructures, which employs interference of high-order diffraction beams. The coherent plane wave which propagates through a diffraction grating generates multiple beams when the grating period is larger than the wavelength. The multiple beams generate three dimensional intensity profile at the near-field through their interference which is periodic at multiscales. The profile can be transferred into a thin film of photoresist to make 2D complex nanostructures. In particular, the adjustment of distance between the diffraction grating and photoresist enable the creation of various hierarchical nanostructures. |
