| 학회 |
한국고분자학회 |
| 학술대회 |
2002년 봄 (04/12 ~ 04/13, 서울대학교) |
| 권호 |
27권 1호, p.156 |
| 발표분야 |
분자전자 부문위원회 |
| 제목 |
Fabrication of Multimode Waveguide using a Photosensitive Polymer for Optical Interconnection |
| 초록 |
We have fabricated thermally stable, large core (50μm × 50μm) multimode waveguides for optical interconnection using a photosensitive polymer SU-8. The polymer allows simple process to fabricate waveguides because it does not require reactive ion etching. Simple exposure to UV light followed by development of the polymer makes waveguide patterns. We used the material as the core and Cyclotene as the cladding material. The materials are stable up to 200℃. The fabricated waveguides show the propagation loss smaller than 0.7 dB/cm at the wavelength of 830 nm. 45° mirror was fabricated by dicing the waveguides with a 45° diamond blade. The thermal stability was tested by the measurement of the refractive index change and UV-Vis spectrum. |
| 저자 |
김준성, 강재욱, 김장주
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| 소속 |
광주과학기술원 신소재공학과 |
| 키워드 |
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| E-Mail |
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