학회 |
한국공업화학회 |
학술대회 |
2007년 봄 (05/11 ~ 05/12, 계명대학교) |
권호 |
11권 1호 |
발표분야 |
무기재료 |
제목 |
Fabrication of Ceramic Line Pattern from ceramic precursors via UV-nanoimprint lithography |
초록 |
The SiC-based ceramic nanopatterns were prepared by placing PDMS mold from DVD master on the spincoated polyvinylsilazane (PVS) or allylhydridopolycarbosilane (AHPCS) as ceramic precursors to fabricate line pattern via UV-nanoimprint lithography (UV-NIL), and subsequent pyrolysis at 800℃ in nitrogen atmosphere. |
저자 |
민경익, 박준홍, 김동표
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소속 |
충남대 |
키워드 |
UV-NIL; ceramic patterns; shrinkage
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E-Mail |
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