화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2007년 봄 (05/11 ~ 05/12, 계명대학교)
권호 11권 1호
발표분야 무기재료
제목 Fabrication of Ceramic Line Pattern from ceramic precursors via UV-nanoimprint lithography
초록 The SiC-based ceramic nanopatterns were prepared by placing PDMS mold from DVD master on the spincoated polyvinylsilazane (PVS) or allylhydridopolycarbosilane (AHPCS) as ceramic precursors to fabricate line pattern via UV-nanoimprint lithography (UV-NIL), and subsequent pyrolysis at 800℃ in nitrogen atmosphere.
저자 민경익, 박준홍, 김동표
소속 충남대
키워드 UV-NIL; ceramic patterns; shrinkage
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