| 초록 |
With the device downsizing dimensions to the nanometer range, current interest in nanotechnology is focused on the state-of-the-art lithographic development. A great number of studies have been made on polymer thin films for fabricating nanostructures. We have made nanopatterns on various polymer thin films using atomic force microscope (AFM). AFM is used to fabricate patterns and structures in nano scale as well as to obtain topographic images of various surfaces. The polymer thin film is one of the key factors in successful application of AFM lithography. From this viewpoint, polymer thin film has the advantages of easy preparation, thermal stability and better resistance against etching solutions than organic self-assembled layer. These nanopatterns could be utilized for fabricating molecular electronic devices and biosensors. |
